1 National Engineering Research Center of Electromagnetic Radiation Control Materials, University of Electronic Science and Technology of China, Chengdu 610054, China
2 State Key Laboratory of Electronic Thin-Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
3 Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China
4 College of Optoelectronic Engineering, Chengdu University of Information Technology, Chengdu 610225, China
5 State Key Laboratory of Vanadium and Titanium Resources Comprehensive Utilization, Panzhihua 617000, China
6 Microsystem & Terahertz Research Center, China Academy of Engineering Physics (CAEP), Chengdu 610200, China
7 Institute of Electronic Engineering, China Academy of Engineering Physics (CAEP), Mianyang 621900, China